2017 Fiscal Year Final Research Report
Development of Ultra Precise X-Y Stage with Air Bearing Realizing Non-Contact Drive and Its Control
| Project/Area Number |
15K05911
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Tokyo Denki University |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Keywords | 精密機械システム / 機械要素 / 制御工学 / 空気圧 / 超精密位置決め |
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| Outline of Final Research Achievements |
Previously we developed new type a pneumatic actuator which supports a piston by air bearing for non-contact drive, and the stage with one-degree of freedom driven by this actuator, the developed stage has mauch higher speed and much higher accuracy than pneumatic actuators. In this study, we have designed the X-Y stage using this actuator having pipe to supply other actuator built-in and realized the compact X-Y stage with high accuracy. Pipe length of the X-Y stage is longer than one of the stage with one-degree of freedom, which make degrade the performance of controllability. So we considered the control method for X-Y stage. As a results, the proposed control method is effective in the linear simulation of X-Y stage.
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| Free Research Field |
工学
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