Research on MEMS devices utilizing thick film permanent magnet

2023 Fiscal Year Final Research Report

• Project/Area Number: 19H00738
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Shinshi Tadahiko 東京工業大学, 科学技術創成研究院, 教授 (60272720)
• Co-Investigator(Kenkyū-buntansha): 中野 正基 長崎大学, 工学研究科, 教授 (20274623) ; 韓 冬 東京工業大学, 科学技術創成研究院, 特任助教 (50825263)
• Project Period (FY): 2019-04-01 – 2024-03-31
• Keywords: 磁気MEMS / 厚膜磁石 / 微細着磁 / ハルバッハ磁石 / マイクロコイル / マイクロアクチュエータ / マクロ振動発電機

Outline of Final Research Achievements

In this study, the following studies were carried out to realize MEMS devices using thick-film magnets, which can contribute to the realization of microactuators for image stabilization for smartphone cameras, micro motors for lens iris drive, and micro-generators for mobile devices: 1) Investigation of thick-film magnet deposition conditions using pulsed laser deposition method. In particular, the effects of the base film on substrate adhesion and magnetic properties were investigated. In addition, the magnet transfer method using the LIFT method was also investigated. 2) Investigation of fine multi-pole magnetization and Halbach magnetization using the laser local heating method and the development of a magnetic batch transfer method during heating. 3) The fabrication methods of guide mechanisms for magnetic MEMS and high-density, high-aspect micro coils were investigated.

Free Research Field

精密工学

Academic Significance and Societal Importance of the Research Achievements

スマートフォンカメラの手振れ補正機構や絞り機構，モバイルデバイスのエネルギー供給に利用可能なマイクロ振動発電機に適用可能な微小な永久磁石やコイルを用いるMEMSデバイスの基盤技術の研究を実施した．これにより，スマートフォンカメラの高性能化，小形化や，スマート社会を支える分散センサのエネルギー供給の解決策を提示することができた．