Energy Dissipation Mechanism in Zero Thermal Expansion Glass and Its Device Applications

2023 Fiscal Year Final Research Report

• Project/Area Number: 21H01776
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 28050:Nano/micro-systems-related
• Research Institution: Tohoku University
• Principal Investigator: Tsukamoto Takashiro 東北大学, 工学研究科, 准教授 (70646413)
• Project Period (FY): 2021-04-01 – 2024-03-31
• Keywords: MEMS / 振動子 / 零熱膨張ガラス

Outline of Final Research Achievements

This study aims to enhance the performance of MEMS oscillators by increasing their Q-factor, focusing on investigating the energy dissipation of zero thermal expansion glass, which holds promise for high performance. The Q-factor of oscillations is influenced by factors such as anchor losses, thermal elastic losses, SFD, and elastic losses. Particularly, thermal elastic losses could potentially be minimized by employing materials with low thermal expansion coefficients, such as ZERO glass, although this has not been previously demonstrated. Moreover, much remains unknown regarding the elastic losses of this material. In this research, we develop micro-scale fabrication techniques for zero thermal expansion glass and elucidate the dominant energy dissipation mechanism through its vibration characteristics.

Free Research Field

MEMS

Academic Significance and Societal Importance of the Research Achievements

第1に，これまでだれも報告していない，零熱膨張ガラスのMEMS応用のための作製プロセス技術を開発した．シリコンとの陽極接合が可能であることやその条件は報告例が無い．また，反応性イオンエッチングによるマイクロメートルオーダーの微細加工技術についても，報告例がなく，今後のデバイス応用のための大きな知見が得られた．
第2に，開発した微細加工技術を用いてMEMS振動子を作製し，その振動特性から，支配的なエネルギー散逸機構を明らかにした．その結果，ZEROガラスは，熱弾性損失を無視できるほど小さくでき，弾性損失がエネルギー損失を支配することが明らかとなった．